Technology of Semiconductor Manufacturing Equipment
General Information
Instructor(s)
- Prof. Dr.-Ing. Lothar Pfitzner
- Prof. Dr.-Ing. Wolfgang Schmutz
Wintersemester 2012
Semester
- EEI-MA: ab 1. Semester
- EEI-BA: ab 5. Semester
- MB-DH: 5.-10. Semester
- ME-DH-VF8: 5.-7. Semester
- ME-BA-MG8: 3.-6. Semester
- ME-MA-MG8: 1.-3. Semester
- WW-DH-EL: 7.-13. Semester
SWS
- 2 SWS
Time and Location
- weekly on wednesday von 15:15 bis 17:45, Hans Georg Waeber Saal
Wintersemester 2013
Semester
- EEI-MA: ab 1. Semester
- EEI-BA: ab 5. Semester
- ME-BA-MG10: 3.-6. Semester
- ME-MA-MG10: 1.-3. Semester
- WW-DH-EL: 7.-13. Semester
SWS
- 2 SWS
Time and Location
- weekly on wednesday von 15:15 bis 17:45, Hans Georg Waeber Saal
Topic
This lecture is dealing with equipment and tools for individual process steps on the one hand and the integration of various process equipment into a fab line on the other hand. Particular emphasis is placed on the fields of mechanical and electronical industrial engineering, equipment elements, subcomponents, equipment control, systems interconnection/chaining, materials and safety engineering, and finally Cost-of-Ownership calculations and yield enhancement. (Part I process technology: CoO (Cost-of-Ownership), contamination control and defect detection, AEC (advanced equipment control), APC (advanced process control), systems for oxidation, diffusion, and tempering, implanters, pattern transfer and delineation equipment, layer deposition and metallization equipment, semiconductor metrology and process control systems. Part II semiconductor fab lines: equipment and system concepts, wafer handling, wafer tracking systems, particle measurement techniques, production engineering/cleanroom and CIM, cleanroom technology and infrastructure.).
Recommended literature
- lecture script (available in course/CD/in the WEB)
- C. Y. Chang, S. M. Sze: ULSI
- Technology, MacGraw-Hill, 1996
- R. P. Donovan: Contamination-Free Manufacturing for Semiconductors and Other Precision Products, Marcel Dekker Inc, 2001
- A. C. Diebold: Handbook of Silicon Semiconductor Metrology, Marcel Dekker Inc, 2001
- Yoshio Nishi: Handbook of Semiconductor Manufacturing Technology, Marcel Dekker Inc, 2000
- Sematech Dictionary: www.sematech.org/publications/dictionary
Vorbesprechung
19.10.2011 ab 15:30 Uhr im Seminarsaal 2 (IISB, Schottkystr. 10, 1. OG)
Downloads
Download area
UnivIS