Prof. Dr. rer. nat. Lothar Frey
| Name: | Prof. Dr. rer. nat. Lothar Frey
|
| Postanschrift: | Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 Erlangen |
| Zimmer: | 1.122 |
| Telefonnummer: | 09131/85-28633 |
| Fax: | 09131/85-28698 |
| E-Mail: | lothar.frey@leb.eei.uni-erlangen.de |
| Sprechstunde: | wöchentlich dienstags 9:00 - 10:00
1.122
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|
Lehrveranstaltungen
Betreute Arbeiten
2013
2012
2011
2010
2009
2002
1999
1997
1996
1995
- Lokaler Schichtabtrag mittels ionenstrahlgestütztem Ätzen
- Mikrobereichsanalyse integrierter Schaltungen mittels ToF-SIMS
1994
1993
1992
Publikationen
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
2000
1999
- »AFM and STM Investigation of Carbon Nanotubes Produced High Energy Ion Irradiation of Graphite«, Nuclear Instruments and Methods in Physics Research 147, 142 (1999)
- »An Analytical Model for Beam Induced Contamination in Ion Implantation«, 12th International Conference on Ion Implantation IIT 98, Kyoto (Japan), 498-501 (1999),
http://nishiki.kuee.kyoto-u.ac.jp/IIT98/
- »Carbon Nanotubes Produced by High Energy (E>100MeV) , Heavy Ion Irradiation of Graphite«, Nuclear Instruments and Methods in Physics Research 148, 1102 (1999)
- »Comparisation of Beam-Induced Deposition Using Ion Microprobe«, Nuclear Instruments and Methods in Physics Research 148, 25 (1999)
- »Forming Nitrided Gate Oxides by Nitrogen Implantation into Substrate before Gate Oxidation by RTO«, IEEE Electron Device Letters, 26 (1999)
- »Impurity Incorporation during Beam Assisted Processing Analyzed Using Nuclear Microprobe«, Nuclear Instruments and Methods in Physics Research 158, 487 (1999)
- »Investigation of Cu Films by Focused Ion Beam Induced Deposition Using Nuclear Microprobe«, Nuclear Instruments and Methods in Physics Research 158, 493 (1999)
- »MOCVD of Ferroelectric Thin Films«, Journal de Physique IV 9, 575-582 (1999)
- »Nano-slit probes for near-field optical microscopy fabrcated by focused ion beams«, Journal of Microscopy 194, 335-339 (1999)
- »Scanning Probe Method Investigation of Carbon Nanotubes Produced by High Enery Ion Irradiation of Graphite«, Carbon-Based Materials for Microelectronics 37, 739 (1999)
- »Simulation of a Coating Protection for an In Situ Ellipsometer in a CVD Furnace«, Proceedings 29th European Solid-State Device Research Conference (ESSDERC99), Leuven (Belgien), 3 (1999)
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