Prof. Dr. rer. nat. Lothar Frey
| Name: | Prof. Dr. rer. nat. Lothar Frey
|
| Postal address: | Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 Erlangen |
| Room: | 1.122 |
| Phone number: | 09131/85-28633 |
| Fax number: | 09131/85-28698 |
| E-mail: | lothar.frey@leb.eei.uni-erlangen.de |
| Office hours: | weekly on tuesday 9:00 - 10:00
1.122
Bitte bei Sekretariat (1.121) anmelden.
|
Courses / Lectures
Supervised theses
2013
2012
2011
2010
2009
2002
- Nanostrukturen für nichtflüchtige Speicher
1999
1997
1996
1995
1994
1993
1992
Publications
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
- »Barium, Strontium and Bismuth Contamination in CMOS Processes«, Solid State Phenomena, 9-14 (2001)
- »Chemische Dampfphasenabscheidung von Materialien mit hoher Dielektrizitätskonstanten am Beispiel Barium-Strontium-Titanat«, Vortrag auf der Konferenz Materials Week 2001, München (2001)
- »Electrical reliability aspects of through the gate implanted MOS structures with thin oxides«, Microelectronics Reliability 41, 987-990 (2001)
- »Experimental and Numerical Study of the CVD of TiO2 using New Titanium Precursors«, Fundamental Gas-Phase and Surface Chemistry of Vapor Deposition II, Washington DC, 160 ff (2001)
- »Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining«, Microelectronic Engineering 57-58, 721-728 (2001)
- »High-resolution Constant-height Imaging with Apertured Silicon Cantilever Probes«, Journal of Microscopy, 22ff (2001)
- »Impact of Platinum Contamination on Ferroelectric Memories«, Integrated Ferroelectrics (Proceedings of the 13th International Symposium on Integrated Ferroelectrics ISIF 2001 - Colorado Springs, CO, USA) 37, 75-82 (2001)
- »In-line Failure Analysis on Pruductive Wafers with Dual Beam SEM/FIB«, 4406, 21-30 (2001)
- »Limitations of focused ion beam nanomachining«, Journal of Vacuum Science and Technology 19, 2533-2538 (2001)
- »MOCVD of Titanium Dioxide on the Basis of New Precursors«, ERMSVortrag EMRS 2001, Strasbourg (Frankreich) (2001)
- »Proceedings of the 12th International Conference on Ion Implantation Technology«, IIT 2000, Alpbach, Österreich (2001)
- »Tungsten, Nickel, and Molybdenum Schottky Diodes with Different Edge Termination«, Applied Surface Science 7274, - (2001)
- »Tungsten, Nickel, and Molybdenum Schottky Diodes with Different Edge Termination«, E-MRS 2001 Spring Meeting, Strasbourg (Frankreich) (2001)
2000
1999
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