Prof. Dr. rer. nat. Lothar Frey
| Name: | Prof. Dr. rer. nat. Lothar Frey
|
| Postal address: | Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 Erlangen |
| Room: | 1.122 |
| Phone number: | 09131/85-28633 |
| Fax number: | 09131/85-28698 |
| E-mail: | lothar.frey@leb.eei.uni-erlangen.de |
| Office hours: | weekly on tuesday 9:00 - 10:00
1.122
Bitte bei Sekretariat (1.121) anmelden.
|
Courses / Lectures
Supervised theses
2013
2012
2011
2010
2009
2002
1999
1997
1996
1995
1994
1993
1992
- Wärmeuntersuchung während der Ionenimplantation
Publications
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
- »Auf dem Weg zur Siliciumcarbid-Elektronik«, Universität ErlangenTage der Technischen Fakultät 2002, Erlangen (2002)
- »Development of Enhanced Depth-resolution Technique for Shallow Dopant Profiles«, Nuclear Instruments and Methods in Physics Research 1-4, 26 (2002)
- »Effect of Barium Contamination on Gate Oxide Integrity in High-k DRAM«, Journal of Non-Crystalline Solids 303, 12 (2002)
- »Influence of Photoresist Pattern on Charging Damage During High Current Ion Implantation«, 7th Int. Symp. On Plasma & Process Induced Damage, Maui, Hawaii, USA, 106-109 (2002)
- »MOCVD of titanium dioxid on the basis of new precursors«, Journal of non-crystalline solids 303, 64-68 (2002)
- »Platinum Contamination Issues in Ferroelectric Memories«, J. Appl. Phys. 92, 3257 (2002)
- »Verkohltes Silicium - Neues Halbleitermaterial für die Leistungselektronik«, Design-Elektronik, 40 (2002)
2001
2000
1999
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