Prof. Dr. rer. nat. Lothar Frey
| Name: | Prof. Dr. rer. nat. Lothar Frey
|
| Postanschrift: | Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 Erlangen |
| Zimmer: | 1.122 |
| Telefonnummer: | 09131/85-28633 |
| Fax: | 09131/85-28698 |
| E-Mail: | lothar.frey@leb.eei.uni-erlangen.de |
| Sprechstunde: | wöchentlich dienstags 9:00 - 10:00
1.122
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Lehrveranstaltungen
Betreute Arbeiten
2013
2012
2011
2010
2009
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1999
1997
1996
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1992
- Wärmeuntersuchung während der Ionenimplantation
Publikationen
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
- »Additional Peaks in Mass Spectra Due to Charge Exchange Events and Dissociation of Molecular Ions During Extraction«, Poster Presentation on IIT 2004, Taipei, Taiwan (2004)
- »Annealing of Aluminium Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing«, Material Science Forum 621, 438-485 (2004)
- »Design, Fabrication, and Characterization of a Microactuator for Nebulazation of Fluids«, Proceedings of Sensors and Microsystems, Italian Conference 2003, Italy World Scientific, 388 (2004)
- »Electrical Characterization and Reliability Aspects of Zirconium Silicate Films Obtained from Novel MOCVD Precursors«, Microelectronic Engineering 72, 315-320 (2004)
- »High Temperature Processing for SiC Devices«, IISBIISB Jahrestagung 2004, Erlangen (2004)
- »Integration of Field Emitters into Scanning Probe Microscopy Sensors Using Focused Ion and Electron Beams«, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22, 1402 (2004)
- »Investigation of Rapid Thermal Annealed pn-Junctions in SiC«, Material Science Forum, 457-460 (2004)
- »Investigations into the Wear of a WL10 Ion Source«, Poster Presentation on IIT 2004, Taipeh, Taiwan (2004)
- »Modelling of the Influence of Schottky Barrier Inhomogenities on SiC Diode Characteristics«, Material Science Forum 973, 457-460 (2004)
- »Nanofabrication Using Focused Ion and Electron Beams and its Application to Scanning Probe Microscopy Sensors«, International Workshop on Material Science and Nano-Engineering, Osaka, Japan (2004)
- »Nanoimprint«, IISBGemeinsames Kolloquium zur Halbleitertechnologie und Meßtechnik des LEB und des IISB, Erlangen (2004)
- »Nanoimprint Lithographie«, FAU Erlangen-NürnbergVortrag im Rahmen des Habilitationsverfahrens, Erlangen (2004)
2003
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1999
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