Prof. Dr. rer. nat. Lothar Frey
Name: Prof. Dr. rer. nat. Lothar Frey Postal address: Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 ErlangenRoom: 1.122 Phone number: 09131/85-28633 Fax number: 09131/85-28698 E-mail: lothar.frey@leb.eei.uni-erlangen.de Office hours: weekly on tuesday 9:00 - 10:00
1.122
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Courses / Lectures
Supervised theses
2013
1999
- Optimierung des Reinigungsverfahrens „Standard Clean 1 (SC1)"
Publications
- »Impurity Conduction in Silicon Carbide«, Materials Science Forum 556-557, 367-370 (2007)
- »MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications«, Chemical Vapor Deposition 13, 105-111 (2007)
- »Tuning the dielectric properties of hafnium silicate Films«, Microelectronic Engineering 84, 2883 (2007)
- »UV nanoimprint materials: Surface energies, residual layers, and imprint quality«, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 25, 785-790 (2007)
UnivIS