Prof. Dr. rer. nat. Lothar Frey
| Name: | Prof. Dr. rer. nat. Lothar Frey
|
| Postal address: | Lehrstuhl für Elektronische Bauelemente
Cauerstr. 6
91058 Erlangen |
| Room: | 1.122 |
| Phone number: | 09131/85-28633 |
| Fax number: | 09131/85-28698 |
| E-mail: | lothar.frey@leb.eei.uni-erlangen.de |
| Office hours: | weekly on tuesday 9:00 - 10:00
1.122
Bitte bei Sekretariat (1.121) anmelden.
|
Courses / Lectures
Supervised theses
2013
2012
2011
2010
2009
2002
1999
- Optimierung des Reinigungsverfahrens „Standard Clean 1 (SC1)"
1997
1996
1995
1994
1993
1992
Publications
2013
2012
2011
2010
2009
- »(Poster) Influence of FIB patterning strategie on the shape of 3D structures: Comparison of experiments with simulations«, (Poster) MNE 2009 (2009)
- »Characterization of Organic Contamination during Semiconductor Manufacturing Processing«, AIP Conf. Proc. 1173, 23 (2009)
- »Comparative study between conventional macroscopic IV techniues and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale«, Microelectronic Engineering 86, 1911-1914 (2009)
- »Future Challenges in CMOS Process Modeling«, E-MRS 2009, Symposium I, Strasbourg (2009)
- »Highly sensitive wave front sensor for characterization of micro- to nanometer scale surface flatness deviations«, Proc. SPIE 7389, 73890Q (2009)
- »Honeycomb Voids due to Ion Implantation in Germanium«, European Material Research SocietyE-MRS Spring Meeting 2009, Straßburg (2009)
- »Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition«, Microelectronic Engineering 86, 1818-1821 (2009)
- »Lanthanum implantation for threshold voltage control in metal/high-k devices«, Microelectronic Engineering 86, 1782-1785 (2009)
- »Virtual Equipment Engineering: A Novel Approach for the Integrated Development of Semiconductor Manufacturing Equipment«, DETC2009, San Diego, California, USA, 541-547 (2009)
2008
2007
2006
2005
2004
2003
2002
2001
2000
1999
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